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1.问题的提出我厂是生产鍺单晶的专业工厂,采用直拉法生长单晶。为了获得高质量的单晶,除了保证单晶炉温场设计合理,机械运行稳定外,还要用精确控制炉温的方法来间接控制单晶的生长速率,实现单晶的等径生长。整个拉晶过程,分为升温化料、引晶放肩、等径生长、收尾结束四个阶段,其温度变化的工艺曲线如图1。目前,国内通常都采用精密温度控制仪(型号为DWT—702,简称702分机)控制单晶炉炉温,用人为改变设定值来实现图1
1. The question put forward I plant is the production of germanium single crystal factory, the use of Czochralski crystal growth. In order to obtain high quality single crystal, in addition to ensure that the single crystal furnace temperature field design is reasonable, stable operation of the machinery, but also with precise control of the furnace temperature method to indirectly control the growth rate of single crystal to achieve single crystal growth of equal diameter. The entire crystal pulling process, divided into heating material, cited crystal shoulder, equal growth, ending four stages, the temperature curve of the process shown in Figure 1. At present, the precision temperature controller (model DWT-702, referred to as 702 extension) is usually used in China to control the temperature of the single crystal furnace and to change the set value manually to achieve Figure 1