【摘 要】
：
The mean sputter depth depends on the surface composition gradient during ion implantation.For the high fluence ion implantation into a Pt-Cu alloy, the surface
【出 处】
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Journal of Materials Science & Technology
论文部分内容阅读
The mean sputter depth depends on the surface composition gradient during ion implantation.For the high fluence ion implantation into a Pt-Cu alloy, the surface composition gradient of Cu is so large that the difference in mean sputter depth between Pt and Cu, is significant. However, for the high fluence ion implantation into 10B-11B isotope mixture, the surface composition gradient of 10B is so small that the difference in mean sputter depth between 10B and 11B is insignificant.
The mean sputter depth depends on the surface composition gradient during ion implantation. For the high fluence ion implantation into a Pt-Cu alloy, the surface composition gradient of Cu is so large that the difference in mean sputter depth between Pt and Cu, is significant However, for the high fluence ion implantation into 10B-11B isotope mixture, the surface composition gradient of 10B is so small that the difference in mean sputter depth between 10B and 11B is insignificant.
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