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基于高温超导单晶材料Bi2Sr2CaCu2O8+x(BSCCO)的约瑟夫森(Josephson)本征结器件制备工艺,成功制备出形貌整齐、特性良好、一致性高的大尺寸太赫兹辐射源本征结器件.从工艺的各个步骤出发,总结了要点,并对原有工艺做出改进.通过扫描电子显微镜观察刻蚀形貌,总结了光刻最佳后烘温度条件,提出了一套重复性好、成功率高的工艺方法.
Based on the fabrication of Josephson intrinsic junction devices of high-temperature superconducting single crystal material Bi2Sr2CaCu2O8 + x (BSCCO), a large-size terahertz radiation source intrinsic junction device with well-formed, good characteristics and high uniformity has been successfully prepared Based on the various steps of the process, the main points are summarized and improvements are made to the original process.The etching morphology is observed by scanning electron microscopy, the best post-baking temperature conditions are summarized, and a set of repeatability, High success rate of the process.