论文部分内容阅读
血液、体液密度是生物医学工程领域中的一个重要物理参数。介绍了一种利用叉指换能器直接激发兰姆波的新型延迟线型微量液体密度传感器的方案。这种基于Lamb波的传感器结构在制作时不需要其它导层。为提高传感器的灵敏度,在提高机电耦合系数的同时,采用遗传算法,优化了传感器切向和归一化厚度。利用YZ-LiNbO3压电基片制成相应结构的传感器验证了本传感方案。
Blood, body fluid density is an important physical parameter in the field of biomedical engineering. A new type of delay line type micro liquid density sensor using Lambda wave is introduced directly by using interdigital transducer. This Lamb wave-based sensor structure does not require additional conductive layers. In order to improve the sensitivity of the sensor, genetic algorithm is used to improve the electromechanical coupling coefficient and optimize the sensor tangential and normalized thickness. The use of YZ-LiNbO3 piezoelectric substrate made of the corresponding structure of the sensor to verify the sensing scheme.