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频率扫描干涉仪对测量过程中光程差的漂移非常敏感,目标镜的微小位移会被放大几千倍,使得测量结果严重失真,因此必须消除或减弱漂移误差。针对现场测量中目标镜的低频振动或缓慢漂移,根据光频连续正反向扫描测量值漂移误差放大项大小近似相等、符号相反的特性,提出了一种光频连续正反向快速扫描的漂移误差补偿方法,并进行了频率扫描干涉仪漂移误差补偿实验,分析对比补偿前后的实验结果,验证了该方法的可行性。实验结果表明,在测量距离约1543.3mm处,目标镜振动频率为4.7Hz,振幅为1μm,采用补偿后,连续40次采样测量的标准差由补偿前的51.9μm下降到8μm。
Frequency swept interferometers are very sensitive to the drift of the optical path difference during the measurement process, and the small displacement of the target mirror can be magnified thousands of times, seriously distorting the measurement result, so the drift error must be eliminated or reduced. Aimed at the low-frequency vibration or slow drift of the target mirror in field measurement, according to the characteristic that the amplitudes of the error amplification items in the forward and backward scanning of optical frequency continuous measurement are approximately the same and the signs are opposite, a drift of optical frequency continuous positive and negative fast scanning Error compensation method, and carried out a frequency sweep interferometer drift error compensation experiment, analysis of experimental results before and after comparison of compensation to verify the feasibility of the method. The experimental results show that at the measuring distance of 1543.3mm, the target vibration frequency is 4.7Hz and the amplitude is 1μm. After compensated, the standard deviation of 40 consecutive samples is reduced from 51.9μm before compensation to 8μm.