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采用Pechini方法制备Ca(Mg1/3Nb2/3)O3(CMN)及CaTiO3(CT)前驱体溶液,采用液相旋涂技术按照一定的排布方式制备CMN/CT介电异质薄膜,研究薄膜厚度、异质层排布方式及热处理时间等对薄膜的结构与介电性能的影响。结果表明,CMN/CT介电异质薄膜具有单一的钙钛矿结构,异质界面具有介电增强效应,随着薄膜厚度增加,异质结构变得不明显,晶粒尺寸和表面粗糙度增加,介电性能增强,厚度到一定程度以后,介电损耗会明显增加。排列方式对异质薄膜的介电性能产生大的影响,CT薄膜层越靠近底层的异质薄膜的表面粗糙度越大,界面数越多的排布方式的介电增强效应越明显。
The precursor solution of Ca (Mg1 / 3Nb2 / 3) O3 (CMN) and CaTiO3 (CT) was prepared by Pechini method. The CMN / CT dielectric heterogeneous thin films were prepared by liquid phase spin coating technique. , Heterogeneous layer arrangement and heat treatment time on the structure and dielectric properties of the film. The results show that the CMN / CT dielectric heterojunction thin film has a single perovskite structure, and the heterojunction has a dielectric enhancement effect. As the film thickness increases, the heterogeneous structure becomes insignificant and the grain size and surface roughness increase , Dielectric properties increase to a certain extent, the dielectric loss will be significantly increased. The dielectric properties of the heterogeneous thin films are greatly affected by the arrangement. The more the surface roughness of the heterogeneous thin films near the CT thin film is, the more obvious the dielectric enhancement effect is.