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采用热重-差热(TG-DTA)与气-质联用(GC-MS)研究了CVD技术制备钯膜材料的前驱体乙酰丙酮钯[Pd(acac)2]的热分解行为。通过对比其在空气和氩气两种气氛、不同温度下的热裂解产物,认为在以乙酰丙酮钯为前驱体通过CVD技术制备钯膜时,空气比氩气更适合做载气。
The thermal decomposition behavior of Pd (acac) 2 [Pd (acac) 2], a precursor of palladium membrane prepared by CVD, was investigated by TG-DTA and GC-MS. By comparing the pyrolyzed products at different temperatures in both air and argon atmosphere, it is considered that air is more suitable than argon for carrier gas when the palladium membrane is prepared by CVD using palladium acetylacetonate as precursor.