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利用溶胶-凝胶旋涂制膜方法制备了具有良好表面形貌及c轴择优取向性的(Li,Mg)∶ZnO薄膜。重点研究了该法制膜时不同膜厚(Li,Mg)∶ZnO薄膜的结构及光学性质。扫描电子显微镜(SEM)图像及X射线衍射(XRD)图谱分析结果表明随着膜厚的增加,薄膜晶粒尺寸逐渐增大,薄膜的晶化程度及c轴择优取向性增强。但薄膜厚度的增加是有一定范围的,当薄膜厚度过大时,薄膜均匀性、致密性及c轴择优取向性显著下降。样品的荧光光致发光(PL)谱表明,Mg的掺入使近紫外发光峰出现了蓝移,恰当膜厚的(Li,Mg)∶ZnO薄膜发光特性主要以深能级发射(DLE)为主,蓝绿发光峰强度很高。
The (Li, Mg): ZnO films with good surface morphology and c-axis preferred orientation were prepared by sol-gel spin coating. The structure and optical properties of different film thickness (Li, Mg): ZnO films were studied emphatically. Scanning electron microscopy (SEM) images and X-ray diffraction (XRD) pattern analysis showed that with the increase of film thickness, the grain size of the films gradually increased, and the degree of crystallinity and c-axis preferred orientation increased. However, there is a certain range of increase of the film thickness. When the film thickness is too large, the film uniformity, compactness and c-axis preferred orientation are remarkably decreased. Fluorescence photoluminescence (PL) spectra of the samples show that the incorporation of Mg causes a blue shift in the near ultraviolet (UV) emission peak. The luminescent properties of the (Li, Mg) , Blue-green emission peak intensity is high.