Correlation between structure and hardness of magnetron sputtering deposited CN_x films

来源 :中国科学通报：英文版 | 被引量 : 0次 | 上传用户：aghdks

【摘要】

：

Carbon nitride films are deposited on Si (001) substrates by reactive dc magnetron sputtering graphite in a pure N2 discharge. The structure of carbon nitride f

【作者】

：

Weitao Zheng Haibo Li Yuming W

【机构】

：

JilinUniv,LinkopingUniv

【出处】

：

中国科学通报：英文版

【发表日期】

：

1999年12期

【关键词】

：

carbon NITRIDE FILMS STRUCTURE hardness. carbon nitride films structure hardness

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Carbon nitride films are deposited on Si (001) substrates by reactive dc magnetron sputtering graphite in a pure N2 discharge. The structure of carbon nitride films has been probed using Fourier transformation infrared, near edge X-ray absorption fine str

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Correlation between structure and hardness of magnetron sputtering deposited CN_x films

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