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本文以标量散射理论为基础,用概率统计方法建立了粗糙表面的光散射强度在傅氏透镜后焦面上的分布的理论模型,采用镜反射方向的光强与某一散射方向的光强之比来计算R_q值的方法,导出了理论计算公式。实验中以CCD作为光强检测元件,采用微机系统来实现数据采集与处理,并将其结果同轮廓仪测得值进行了比较。从而证明了理论模型的正确性和在加工中进行现场测量的可行性。
Based on the scalar scattering theory, a theoretical model of the distribution of the light scattering intensity of the rough surface on the back focal plane of the Fourier lens is established by using the probability statistical method. The intensity of the light in a mirror reflection direction and the light intensity in a scattering direction Compared with the method of calculating R_q value, the theoretical calculation formula is deduced. In the experiment, the CCD was used as the light intensity detection component, and the data acquisition and processing were realized by the microcomputer system. The results were compared with those measured by the profile analyzer. This proves the correctness of the theoretical model and the feasibility of on-site measurement in processing.