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四波前横向剪切干涉仪的出现为精确、快速地测试激光波前信息提供了很好的研究方法。概述了四波前横向剪切干涉仪的测试原理,对532nm半导体激光器和ZYGO-GPI干涉仪标准激光源的光束波前进行测试,得到平均椭偏率分别为0.977和0.900。通过对测量数据与激光器标称参数对比分析得出四波前横向剪切干涉仪能够精确地测量激光波前信息。
The emergence of the four-wave front transverse shear interferometer provides a good research method for accurately and rapidly testing the laser wavefront information. The testing principle of four-wave front transverse shearing interferometer is summarized. The wavefront of the 532nm semiconductor laser and ZYGO-GPI interferometer standard laser source is tested. The averaged elliptic deviations are 0.977 and 0.900 respectively. By comparing the measured data with the nominal parameters of the laser, it can be concluded that the four-wavefront transverse shearing interferometer can accurately measure the laser wavefront information.