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针对LED晶圆贴片过程,设计一种利用阀门的开关和开度控制气缸内气压的压力控制系统,提出一种多目标分阶段决策和控制的方法,实现活塞运动和加压控制.根据活塞的位移和压力,采用逻辑决策方法,选择需要控制的阀门.根据规划压力与实测压力的差值及其差值变化率,利用模糊自适应PID控制方法控制阀门的开度.采用半张量积的方法将逻辑决策和模糊控制中的推理转变成矩阵形式,以简化运算量,提高运算速度和控制精确度.
Aiming at the process of LED wafer patch, a pressure control system which uses the valve opening and closing to control the pressure inside the cylinder is designed, and a multi-objective phased decision-making and control method is proposed to realize piston movement and pressure control. Of the displacement and pressure, the use of logical decision-making method, the choice of the valve to be controlled.According to the difference between the planned pressure and the measured pressure and the rate of change of the difference, the use of fuzzy adaptive PID control method to control the valve opening.Using semi- The method of logical decision-making and fuzzy control of the reasoning into a matrix form, to simplify the operation, improve the speed of operation and control accuracy.