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本文采用先进的离子注入技术改善金属铍的表面性能。文中选用单一能量注入N~+和分级能量注入N~+两种工艺来强化RJY-40铍的表面,均在不同程度上提高了RJY-40铍的显微硬度和改善了耐磨性。其中分级能量注入N~+样品(Al_2O_3-Be)的摩擦系数由0.5～0.6降低到0.1～0.3左右。采用X光电子谱(XPS)和电镜等手段分析研究了样品的表面成分和结构,并讨论了其强化机制。从效果、工艺、设备等方面将注入N~+和美国注入B~+技术进行比较,认为注入N~+技术有较大的优越性。
This article uses advanced ion implantation technology to improve the surface properties of beryllium metal. In this paper, using single energy injection N ~ + and graded energy injection N ~ + two processes to strengthen the surface of RJY-40 beryllium, to varying degrees, improve the microhardness of RJY-40 beryllium and improve the wear resistance. The friction coefficient of graded energy injection N ~ + sample (Al 2 O 3 -Be) decreased from 0.5 ~ 0.6 to 0.1 ~ 0.3. The surface composition and structure of the samples were analyzed by X-ray photoelectron spectroscopy (XPS) and electron microscopy. The strengthening mechanism was also discussed. From the aspects of effect, technology, equipment and so on, it is concluded that the technology of injecting N ~ + is superior to the technology of injecting B ~ + into USA.