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本文介绍用微晶玻璃衬底制作Pb薄膜约瑟夫森结的工艺。实验结果表明,采用这种衬底制作的单结和结列阵的临界电流I_c,全超导能隙电压2△/e和结电阻R_N,具有较好的一致性和重复性。
This article describes the use of glass-ceramic substrate made of Pb Josephson junction film process. The experimental results show that the critical current I_c, the full superconducting gap voltage 2Δ / e and the junction resistance R_N of the single junction and the junction array fabricated by using this substrate have good consistency and repeatability.