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日本计量研究所开发了一种搬运方便的接触式激光干涉测微器。该测微器的激光光源置于外部,光用光导纤维传输,干涉系统为一小型整体化装置。以往的干涉仪,不需要校正,可以进行高
Japan Institute of Metrology developed a portable handling contact laser interferometer. The micrometer’s laser light source is placed outside and the light is transmitted through the optical fiber. The interference system is a small, integrated unit. Conventional interferometers do not require calibration and can be done high