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在钟罩式内极反应器中进行了六甲基二硅氧烷(HMDSO)和四氟化碳(TFM)混合气体等离子体聚合。用IR、XPS、X射线对聚合膜结构进行了表征。等离子体共聚合膜中含有Si和F,聚合膜中元素组成依赖于起始混合气体单体的比,Si/C元素比随着混合气体中TFM浓度增加而减小,而F/C比增大。测定了复合膜的气体透过性,等离子体共聚合方法是制备气体分离膜的可行方法。同时,还测定了等离子体聚合膜的接触角,并计算了表面能。
Plasma polymerization of hexamethyldisiloxane (HMDSO) and carbon tetrafluoride (TFM) mixed gas was performed in a bell-type internal-pole reactor. The structure of the polymeric membrane was characterized by IR, XPS and X-ray. The plasma copolymerization film contains Si and F, and the elemental composition in the polymer film depends on the ratio of the starting mixed gas monomer, and the Si / C element ratio decreases as the concentration of TFM in the mixed gas increases, while the F / C ratio increases Big. The gas permeability of the composite membrane was measured. The plasma copolymerization method is a feasible method to prepare the gas separation membrane. At the same time, the contact angle of the plasma polymerization film was also measured and the surface energy was calculated.