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本文采用多弧离子镀技术在Ti6Al4V合金表面沉积TiCN防护薄膜,研究该薄膜在干摩擦,水及海水介质条件下的摩擦学行为。研究结果显示,所制备的TiCN薄膜具有均匀致密的结构,薄膜厚度约为1μm。薄膜成分主要含有Ti、N和C,并含有少量的O。C主要为污染碳和TiC的形式,N为TiN的结构,Ti主要以TiN、TiC和TiO三种价态形式存在。薄膜的硬度达到20 GPa,在大气环境中薄膜摩擦系数约为0.35,明显低于未镀膜钛合金的摩擦系数(0.7)。镀膜样品的磨损率显著降低,未镀膜样品的磨损率是镀膜样品的132倍。水和海水环境下TiCN膜的摩擦系数进一步降低至0.2左右,同时磨损率也显著降低。与水环境相比,海水环境中TiCN薄膜的磨损率略有增加。
In this paper, multi-arc ion plating technique was used to deposit TiCN protective film on the surface of Ti6Al4V alloy to study the tribological behavior of the film under dry friction, water and seawater conditions. The results show that the prepared TiCN film has a uniform and compact structure, the film thickness is about 1μm. The thin film composition mainly contains Ti, N and C, and contains a small amount of O. C is mainly in the form of carbon pollution and TiC, N is TiN structure, and Ti mainly exists in the form of TiN, TiC and TiO. The hardness of the film reaches 20 GPa, the coefficient of friction of the film is about 0.35 in the atmosphere, which is obviously lower than that of the uncoated titanium alloy (0.7). The wear rate of the coated samples was significantly reduced, with uncoated samples at 132 times the wear rate of the coated samples. The friction coefficient of TiCN film in water and seawater environment is further reduced to about 0.2, and the wear rate is also significantly reduced. Compared with the water environment, the wear rate of TiCN film in seawater environment slightly increased.