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采用过滤阴极真空电弧技术制备了不同硼含量的掺杂四面体非晶碳薄膜(ta-C:B)。使用椭偏仪和紫外-可见光分度计测试了薄膜的折射率、消光系数、透过率和反射率。结果表明,硼含量小于2.13%时,硼含量增加,薄膜折射率缓慢增大;消光系数基本保持不变。当硼含量继续增加到3.51%和6.04%时,折射率分别迅速增加至2.65和2.71,相应的消光系数增大至0.092和0.154;而薄膜的光学带隙从2.29eV缓慢减小至1.97eV,后又迅速降至1.27eV。同时ta-C:B膜的透过率逐渐减小,反射率逐渐增大,表明硼的掺入降低了薄膜的透光性能。ta-C:B膜光学性能的变化,除了与sp3杂化碳的含量有关外,还取决于薄膜中sp2杂化碳的空间分布特点。
Doping tetrahedron amorphous carbon films with different boron contents (ta-C: B) were prepared by using filtered cathode vacuum arc technique. The refractive index, extinction coefficient, transmittance and reflectivity of the films were measured using an ellipsometer and an ultraviolet-visible spectrophotometer. The results show that when the boron content is less than 2.13%, the content of boron increases and the refractive index of the film slowly increases. The extinction coefficient remains unchanged. When the boron content continues to increase to 3.51% and 6.04%, the refractive index increases rapidly to 2.65 and 2.71, respectively, and the corresponding extinction coefficient increases to 0.092 and 0.154. The optical band gap decreases slowly from 2.29eV to 1.97eV, Then quickly dropped to 1.27eV. At the same time, the transmittance of ta-C: B film gradually decreased and the reflectivity increased gradually, which indicated that the incorporation of boron reduced the transparency of the film. The change of optical properties of ta-C: B film depends not only on the content of sp3 hybrid carbon, but also on the spatial distribution of sp2 hybrid carbon in the film.