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在半导体器件 Monte Carlo模拟中 ,自散射的引入是为了简化确定自由飞行时间的计算。文中证明了自散射的引入不改变真实散射的时间分布 ,从而使各种自散射方法有了统一的理论依据。
In the Monte Carlo simulation of semiconductor devices, the introduction of self-scattering is to simplify the calculation to determine the free-flight time. The paper proves that the introduction of self-scattering does not change the time distribution of the real scattering, so that a variety of self-scattering methods have a unified theoretical basis.