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应用非平衡闭合磁控溅射技术在渗碳淬火基体上制备了类石墨复合膜,用SEM、AFM和TEM分析了金属基类石墨复合膜的表面形貌和截面结构,并测试了类石墨复合膜的摩擦学特性。结果表明,类石墨复合膜是由柱状多晶过渡层+非晶梯度层+类石墨复合层组成的多层结构。
Graphite-like composite films were prepared on carburized and quenched substrates by unbalanced closed magnetron sputtering. The surface morphology and cross-sectional structure of the metal-based graphite composite films were analyzed by SEM, AFM and TEM. Tribological properties of the film. The results show that the graphite-like composite film is a multi-layer structure composed of columnar polycrystalline transition layer + amorphous gradient layer + graphite-like composite layer.