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ＢＧ－１０１＿Ｊ型分步光刻机使用报告根据中电军基１９９１１２４号文（合同号９１０４Ｅ０１１），电子部第四十五所提供实用整机ＢＧ－１０１Ｊ投影光刻机，用于北京市半导体器件三厂完成国防科工委下达的军用大规模集成电路８０Ｃ８６系列器件开发（科工委１９９１计...
BG-101_J type stepper lithography machine use report according to the military Junji No. 1991124 (contract No. 9104E011), the Ministry of Electronics 45th to provide practical machine BG-101J projection lithography machine for semiconductor devices in Beijing Three plants to complete the National Defense Science and Industry Commission issued military large-scale integrated circuits 80C86 series of device development (SCM ...