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A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.
A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in wide range flow measuring properties. The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed. The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4 m / s flow and saturated from 0.75 m / s flow. Even the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0 m / s.Thus, this suggests new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.