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本研究工作的目的是要确定用于校准10~(-10)乇以下真空计的真空系统的性能,并研究 Lafferty(1961)研制的热阴极磁控管真空计的特性。同时也对市售冷阴极真空计B-A 真空计和质谱计进行评定。采用的不锈钢真空系统如图1所示。校
The purpose of this work was to determine the performance of the vacuum system used to calibrate the vacuum gauge below 10 to 10 Torr and to investigate the characteristics of the hot cathode magnetron vacuum gauge developed by Lafferty (1961). Commercial cold cathode vacuum gauges B-A vacuum gauges and mass spectrometers were also evaluated. The stainless steel vacuum system shown in Figure 1. school