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本文讨论了四极SIMS(二次离子质谱仪)的检测灵敏度及其主要影响因素,评述了目前一些商品仪器在给出仪器灵敏度和检测极限时所存在的问题,对SIQMS-1型仪器的灵敏度、本底以及本底信号比这三个指标提出了明确的定义并进行了测试。与其它表面分析技术相比,SIMS的一个突出优点是它对许多元素及化合物具有很高的检测灵敏度。但在目前众多的商品四极SIMS仪器中,如何正确反映检测灵敏度的问题尚未完全解决。我们在研制SIQMS-1型仪器的过程中对这个问题进行了一些探讨。
In this paper, the detection sensitivity of quadrupole SIMS (secondary ion mass spectrometer) and its main influencing factors are discussed. The current problems of some commercial instruments when the sensitivity and detection limit are given are discussed. The sensitivity of SIQMS-1 instrument , The background and the background signal than the three indicators put forward a clear definition and tested. An outstanding advantage of SIMS over other surface analysis techniques is its high sensitivity to many elements and compounds. However, in many current commercial quadrupole SIMS instruments, how to correctly reflect the detection sensitivity has not yet been fully resolved. We explored this issue in the development of the SIQMS-1 instrument.