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本文讨论了四极SIMS仪器质量分辨指标的定义和测试问题。根据四极SIMS仪器的工作特点,提出应当用绝对质量分辨本领△M及~(95)Mo~+与~(96)Mo~+之间谷峰比表征仪器的质量分辨能力。
This article discusses the definition and testing of quadrupole SIMS instrument quality indicators. According to the working characteristics of the quadrupole SIMS instrument, it is proposed that the mass resolving power of the instrument should be characterized by the absolute mass resolving power between M and ~ (95) Mo ~ + and ~ (96) Mo ~ +.