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利用测试结构,在等温变湿及等湿变温条件下测量SiO_2表面电导率。由这些实验结果推导出SiO_2表面电导率的温度、湿度数学模型及其加速因子。
Using the test structure, the surface conductivity of SiO 2 was measured under conditions of isothermal wetting and isothermal wetting. From these experimental results, the mathematical model of temperature and humidity of the surface conductivity of SiO 2 and its accelerating factor were deduced.