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采用化学共沉淀法制备ITO前驱物,分别于600及1000℃下热处理前驱物,得到两种ITO粉体。粉体模压成型得到素坯,在400～1550℃内采用烧结法、氧气氛下烧结素坯制备出ITO靶材。对粉体及靶材进行表征和分析,研究了烧结过程中晶粒生长情况、靶材微结构与温度之间关系及靶材的失氧现象。得出600℃粉体为单相ITO固溶体、粒径为15nm,1000℃粉体有少量SnO2析出、粒径为28nm且其分散性和晶化程度优于600℃的粉体。两种粉体烧结制备靶材过程符合Coble固相烧结理论,1550℃时晶体出现类似二维成核生长方式的生长台阶。靶材密度随温度升高而增加,1550℃时随保温时间延长而增加。靶材致密化过程由团聚程度及团聚体大小决定,1000℃粉体制备的靶材密度高于600℃粉体所制靶材。两类靶材含氧量均低于理论值,1000℃粉体所制靶材含氧量高于600℃的含氧量。
The ITO precursors were prepared by chemical coprecipitation, and the precursors were heat-treated at 600 and 1000 ℃ respectively to obtain two ITO powders. The green body is molded by powder molding, and sintered at 400-1550 DEG C, and the ITO target material is prepared by sintering the green body in an oxygen atmosphere. The powder and the target material were characterized and analyzed, the grain growth during the sintering process, the relationship between the microstructure of the target material and the temperature and the oxygen loss phenomenon of the target material were studied. The results show that the 600 ℃ powder is a single-phase ITO solid solution with a particle size of 15nm and a small amount of SnO2 precipitated at 1000 ℃. The particle size is 28nm and its dispersivity and crystallinity are better than 600 ℃. The sintering process of the two powders complies with the theory of Coble solid-state sintering. When the temperature is 1550 ℃, there is a growth step similar to the two-dimensional nucleation and growth mode. The density of the target increases with increasing temperature and increases with holding time at 1550 ℃. The target densification process is determined by the agglomeration degree and agglomerate size. The density of the target prepared at 1000 ℃ is higher than that at 600 ℃. Oxygen content of the two targets are lower than the theoretical value, 1000 ℃ powder target made of oxygen content higher than 600 ℃ oxygen content.