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目的探索磁控溅射制备的Ti-Al-Si-N涂层在不同环境温度下的摩擦学性能。方法利用磁控溅射技术,在AISI304不锈钢表面制备了Ti-Al-Si-N涂层,采用扫描电镜、能谱仪和X射线衍射仪研究了涂层的成分与微观结构,利用HT-1000型高温摩擦磨损试验机,以直径为5 mm的Al_2O_3球作为摩擦副,研究了Ti-Al-Si-N涂层在室温、200、400、600℃时的摩擦学性能。结果磁控溅射制得的Ti-Al-Si-N涂层表面平整、致密,具有典型的柱状晶结构;在室温、200、400、600℃的环境温度下,涂层的摩擦系数分别为0.6、0.35、0.25和0.2,磨损体积分别为0.319、0.232、0.0149和0.0136 mm~3。涂层的摩擦系数和磨损体积均随温度的升高而降低。结论随着测试温度的升高,磨痕区域生成越多的以氧化钛和氧化铝为主的氧化物,其具有一定的减摩作用。在室温下,涂层的磨损机理主要为疲劳剥落,200℃时为磨粒磨损,400℃时为磨粒磨损和氧化磨损,600℃时主要为氧化磨损。
Objective To investigate the tribological properties of Ti-Al-Si-N coatings prepared by magnetron sputtering at different ambient temperatures. Methods Ti-Al-Si-N coatings were prepared on AISI 304 stainless steel by magnetron sputtering. The composition and microstructure of the coatings were characterized by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction. Type tribological test equipment, the tribological properties of Ti-Al-Si-N coating at room temperature, 200, 400 and 600 ℃ were investigated by using Al 2 O 3 balls with a diameter of 5 mm as the friction pair. Results The surface of Ti-Al-Si-N coating prepared by magnetron sputtering was flat and dense with typical columnar crystal structure. The friction coefficient of the coatings at ambient temperature of 200, 400 and 600 ℃ were 0.6, 0.35, 0.25 and 0.2 respectively, and the wear volumes were 0.319, 0.232, 0.0149 and 0.0136 mm ~ 3, respectively. Coefficient of friction and wear volume of the coatings decrease with increasing temperature. Conclusion With the increase of the test temperature, the more oxide-based and oxide-based oxides generated in the wear scar area have a certain anti-friction effect. At room temperature, the wear mechanism of the coating is mainly fatigue spalling, abrasive wear at 200 ℃, abrasive wear and oxidation wear at 400 ℃, and oxidation wear at 600 ℃.