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Using Co2O3 as the Co source, doped cerium oxide thin films with the composition of Ce0.97Co0.03O2-δ (CCO)are deposited on Si(111) and glass substrates by pulse laser deposition technique. X-ray diffraction reveals that CCO films with (111) preferential orientation are grown on Si, while the film on glass is polycrystalline with nanocrystal. X-ray photoelectron spectroscopy shows that the Co displaces the Ce atom and exists in high spin state rather than low spin state, which contributes to the room-temperature ferromagnetism confirmed by vibration sample magnetometer.