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一、前言实际生产过程中,那些来自生产条件(如:负荷状况等),外部环境(如:电网波动量等)及系统本身参数的内、外部扰动往往导致系统动态性能发生较大变化。此时,基于系统固定数学模型的经曲反馈调节器,有时难于使系统性能指标保持最优,甚至因而引起系纯的不稳定。本文以外延炉为应用对象,主要针对温
I. Introduction In the actual production process, those internal and external disturbances from the production conditions (such as load conditions), the external environment (such as power grid fluctuations, etc.) and the parameters of the system itself often lead to major changes in system dynamic performance. In this case, based on the system fixed mathematical model of the warp feedback regulator, it is sometimes difficult to maintain the optimal system performance indicators, and even caused pure system instability. In this paper, the application of epitaxial furnace, mainly for temperature