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多层膜中气体原子能够增加入射X射线散射,减低多层膜衍射反射率.当薄膜有气体原子存在时,通常用平均散射因子代替本体材料散射因子计算薄膜的光学常数.这样的处理方法是非常简单的,鉴于此,提出了一新方法研究气体原子对薄膜X射线反射特性的影响.理论分析表明:气体原子对薄膜反射特性的影响与掠入射角度、波长有关 波长越短和掠入射角度越大,气体原子的影响就越大,反之就越小.实验结果证明理论分析是正确的.
Gas atoms in multilayer films can increase the incident X-ray scattering and reduce the diffraction reflectivity of multilayer films.When there are gas atoms in the films, the optical constants of the films are usually calculated by using the average scattering factor instead of the bulk material scattering factor In view of this, a new method is proposed to study the influence of gas atoms on the X-ray reflection characteristics of the films.The theoretical analysis shows that the influence of gas atoms on the reflection characteristics of the film is related to the grazing incidence angle, the shorter wavelength and the grazing incidence angle The bigger the influence of gas atoms, the smaller the converse, the experimental results show that the theoretical analysis is correct.