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为了及时掌握国外半导体专用设备的发展概况,给国内广大用户提供系统的信息,电子工业部48、24两研究所受国务院电子振兴领导小组办公室的委托,联合编写了《国外半导体专用设备手册》书稿。为了确保该书的编写质量,电子工业部元器件管理局邀请了部分专家教授于7月4日至8日在长沙召开了该书的审稿会议,来自清华大学、中国科学院微电子中心、电子部有关所、厂共10个单位14位代表出席了这次会议。国务院
In order to keep abreast of the development of foreign semiconductor equipment profiles, to provide domestic users with systematic information, the Ministry of Electronics Industry 48,24 Institute commissioned by the State Council’s Office of the e-revitalization of the mandate of the Commission, jointly prepared a “manual for foreign semiconductor equipment,” the manuscript . In order to ensure the quality of the compilation of the book, the Electronic Components Department of the Ministry of Electronics Industry invited some experts and professors to hold a review conference for the book in Changsha from July 4 to July 8, from Tsinghua University, the Microelectronics Center of Chinese Academy of Sciences, Ministry of the relevant units, a total of 10 units 14 representatives attended the meeting. State Department