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报道了硅片直接键合SOI单模梯形大截面脊形波导的研制.对于波长为1.3μm的光,这种脊形波导的传输损耗小于0.85dB/cm.
Reported the direct bonding silicon wafer SOI single-mode trapezoidal large-section ridge waveguide research. For light with a wavelength of 1.3 μm, the transmission loss of such a ridge waveguide is less than 0.85 dB / cm.