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本文对双极晶体管制作中如何有效地控制好h_(FE)和BV_(c60) 的条件作了较详细的工艺实验,并导出其必要条件为Δσ_i°≥Δσ_i,然后通过扩散规律及器件结构功能的分析,探讨提高h_(FE)和BV_(c60)工艺可控性的工艺方法与控制途径。
In this paper, how to effectively control the h_ (FE) and BV_ (c60) conditions in the fabrication of bipolar transistors has been studied in detail. The necessary conditions for the bipolar transistor production are Δσ_i ° ≥Δσ_i, then the diffusion rules and device structure functions Analysis of the process to improve the h_ (FE) and BV_ (c60) process controllability of the process methods and control methods.