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本文给出膜片式压力传感器初步设计的一般性指南。在实际开发和设计传感器的过程中,需要对由膜片的直径和厚度决定的灵敏度、线性、频率响应等进行最优的计算和选择,以达到所要求的性能。文中所使用的一些公式是以下列假定为基础的:1.膜片的厚度是均匀的;2.膜片的变形量很小;3.膜片整个圆周为刚性夹紧;4.膜片处在完全弹性的工作状态;5.膜片上粘有应变片后,对膜片的刚性和质量所产生的影响可忽略不计。根据实际传感器对上述假定的偏离程度,所用的计算公式都将有一定的不精确性。因此,这些公式只能在设计传感器的初始阶段使用,以便大致确定传感器的性能。
This article gives a general guide to the preliminary design of diaphragm pressure transducers. In the actual development and design of the sensor process, the sensitivity and linearity, frequency response and so on determined by the diameter and thickness of the diaphragm need to be calculated and selected optimally to achieve the required performance. Some of the equations used in this paper are based on the following assumptions: 1. The thickness of the diaphragm is uniform; 2. The amount of deformation of the diaphragm is small; 3. The entire periphery of the diaphragm is rigidly clamped; 4. The diaphragm In a fully flexible state of work; 5. Diaphragm attached to the strain gauge, the rigidity of the diaphragm and the quality of the impact can be neglected. According to the actual sensor on the assumption of the degree of deviation, the formula used will have some inaccuracy. Therefore, these equations can only be used during the initial design of the sensor to determine the sensor’s performance.