Method for in situ calibration of multiple feedback interferometers

• 作 者: 谈宜东 曾召利 张书练 张鹏 陈浩
• 机 构: State Key Lab of Precision Measurement Technology and Instrument, Department of Precision Instrument
• 出 处: Chinese Optics Letters
• 发表日期: 2013年10期
• 关键词: calibration interferometer mirror fringe counted discrimination utilized posed c

A method is presented for in situ resolution calibration of multiple feedback interferometers(MFIs)using two lasers with di?erent feedback levels simultaneously.The laser with weak optical feedback level generates half-wavelength optical fringes,whereas the laser with strong multiple feedback level generates optical nanofringes.By using this method,the number of displaced optical nano-fringes can be easily counted,and the resolution of the MFIs can be accurately determined.The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.

A method is presented for in situ resolution calibration of multiple feedback interferometers (MFIs) using two lasers with di? Erent feedback levels simultaneously. Laser with weak optical feedback level generates half-wavelength optical fringes, optical nanofringes. By using this method, the number of displaced optical nano-fringes can be easily counted, and the resolution of the integrated MFIs can be used to measure displacements and calibrate other displacement sensors.