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一、引言测量厚度是板材及薄膜型产品的基本问题,在自动化流水线上,要求在运流过程中测量产品的厚度,取值,并进行反馈,以保产品的质量。测量分辨率为1μm 量级,则有迈克逊法,10μm 分辨率的测量,则有各种量具,但分辨为1～10μm 之间的测量,本方案是一种比较简捷可靠的方法。本仪器测量的动态范围是±0.5mm,精度为±0.01mm,特点是无伤害人体的辐射,与被测物体表面无机械接触,测量精度高,校准方便及定标准确。本仪器分两部份:传感器和信号处理及显示。
I. INTRODUCTION Measuring thickness is the basic problem of sheet metal and thin film products. On the automated assembly line, it is required to measure the thickness and the value of the product in the process of transporting and feedback to ensure the quality of the product. Measuring resolution of 1μm order of magnitude, then the Michaelis method, 10μm resolution measurement, there are a variety of measuring tools, but the resolution is between 1 ~ 10μm measurement, the program is a relatively simple and reliable method. The instrument measures the dynamic range is ± 0.5mm, accuracy of ± 0.01mm, characterized by no harm to the human body radiation, no mechanical contact with the surface of the measured object, high accuracy, easy calibration and accurate calibration. The instrument is divided into two parts: sensor and signal processing and display.