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本文较详细地介绍了从英国引进的电子背散射衍射(EBSD)的原理、装置构造、实验分析方法及其在钢铁材料领域里的应用.目前,EDS 与 EBSD 已集成在一起,二者安装在扫描电镜上,不但能同时分析样品上一点的成分与晶体结构参数,且能对块状样品作亚微米级的结晶学分析,当电子束逐点扫描分析时还可得刊一种全新的图像—晶体取向分布图(COM),从而获取显微区域的形貌、成分及结构的面分布的定量分析结果.开辟了显微织构这一全新的科学领域.
This paper introduces the principle, device structure and experimental analysis of electron backscatter diffraction (EBSD) introduced from the UK in detail and its application in the field of steel materials.At present, EDS and EBSD have been integrated together, Scanning electron microscopy, not only can analyze a sample of the composition and crystal structure parameters at the same time, and the bulk samples for sub-micron crystallographic analysis, when the electron beam point-by-point scan analysis can also be published a new kind of image - Crystal Orientation Distribution (COM) to obtain the quantitative analysis results of the surface profile, composition and structure distribution of the microscopic region, and opened up a brand new scientific field of microstructure.