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在现代电子光学与电子束技术研究中,Boersch效应作为离散空间电荷效应的一个主要特征,越来越引起了人们的重视。本实验设计并制作了一台观察和测量Boersch效应的实验装置,并进行了动态真空实验。实验装置的电子光学系统包括层流电子枪、聚焦透镜、准直透镜和拒斥场分析器等部分。对实验结果及数据进行了处理和分析,观测到了电子能量分布的反常增宽现象并测量了能量分布曲线。当束腰区束流为微安量级时,测得的电子能量分布宽度为1~3eV,并且得出了随着束流强度的增加能量分布展宽的近似规律。
In the research of modern electron optics and electron beam technology, Boersch effect has drawn more and more attention as one of the main characteristics of the discrete space charge effect. In this experiment, an experimental device for observing and measuring Boersch effect was designed and manufactured, and a dynamic vacuum experiment was carried out. The electro-optical system of the experimental device includes laminar electron gun, focusing lens, collimating lens and rejection field analyzer. The experimental results and data were processed and analyzed, the anomalous broadening of the electron energy distribution was observed, and the energy distribution curve was measured. When the beam waist region beam is microampere, the measured electron energy distribution width is 1 ~ 3eV, and the approximate law of broadening the energy distribution with increasing beam intensity is obtained.