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在电镜安装之前和在以后的使用过程中,要对安装仪器的地点进行机械震动的测试,使其震动幅度符合电镜制造厂家提出的要求,如日本日立公司生产的H—600透射电镜允许的震动幅度为: 频率幅度 5HZ <1μm 10HZ <4μm 50HZ <6μm 震动频率愈低,允许震动幅度值愈小。如果震动幅度超过了容许值,对于透射电镜来讲就会使图象沿震动方向发生移动而影响分辨率,对于扫描电镜来讲,使图象发生锯齿状。
Before and after the installation of the electronic microscope, the location of the instrument should be tested for mechanical vibration so that the vibration amplitude meets the requirements of the electron microscope manufacturer. For example, the allowable vibration of the H-600 TEM made by Hitachi, Japan Amplitude: Frequency range 5HZ <1μm 10HZ <4μm 50HZ <6μm The lower the vibration frequency, the smaller the allowable vibration amplitude. If the vibration amplitude exceeds the allowable value, for the transmission electron microscope will make the image along the vibration direction to move and affect the resolution, in terms of SEM, the image jagged.