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前言超大规模集成电路微细加工精密工作台(如图形发生器等)驱动机构的设计计算至今仍然建立在静力学的基础上。驱动电机和机构的选择及计算没有考虑整个工作台系统由于运动所产生的动力作用,而且,驱动电机的选择和计算常常都只限于采用经验和估计的方法。随着大规模和超大规模集成电路工艺的飞速发展,微细加工精密工作台的各部分运动速
Preface Ultra-large-scale integrated circuit micro-machining Precision workbench (such as graphics generator, etc.) The design and calculation of the drive mechanism is still based on the static mechanics. The selection and calculation of drive motors and mechanisms do not take into account the dynamic effects of the entire workbench system due to motion. Moreover, the selection and calculation of drive motors are often limited to empirical and estimation methods. With the rapid development of large-scale and very large-scale integrated circuit technology, each part of micro-machining precision work table speed