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一、引言表面电离离子源在电磁同位素分离器、质谱计、离子发动机、溅射负离子源等装置中得到了广泛的应用。使用表面源(即表面电离离子源)时,总是遇到离子束的束型问题,即表面源的引出特性问题。表面源由于产生离子的机制不同于气体放电离子源,不存在等离子体“弯月面”。离子发射面是电离器表面,它是刚体,不随引出参数和引出束流的变化而变化。因此,用表面源研究透镜效应和束空间电荷的作用是十分有利的。但到目前为止,还未见到对表面源的引出特性作系统的研究。
I. INTRODUCTION Surface ionization ion source has been widely used in electromagnetic isotope separator, mass spectrometer, ion engine, sputtering negative ion source and other devices. When using a surface source (ie, a surface ionization ion source), the beam type problem of the ion beam is always encountered, namely the problem of the extraction properties of the surface source. Surface Sources There is no plasma “meniscus” due to the mechanism by which ions are generated that is different from the gas discharge ion source. The ion emitting surface is the surface of the ionizer and it is a rigid body that does not change with the outgoing parameters and the outgoing beam current. Therefore, the use of surface sources to study lens effects and beam space charge is very beneficial. However, up to now, no systematic study has been done on the characteristics of the surface source.