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The cavity growth was studied in uniaxial tension of superplastic magnesium alloy. An exponentially increasing cavity growth model was introduced into the numerical simulation effectively. A three-dimensional rigid visco-plastic finite element method (FEM) program was developed to predict the variation of radius and volume fraction of cavity. Experimental radius and volume fraction of cavity were determined based on the optical microscope observation and analyses. The values obtained by numerical simulation are perfectly in agreement with experimental results. The results are potentially helpful to designing the optimal processing parameters for superplastic forming of materials and to enhance their subsequent mechanical properties.