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超净室(Super Clean Room) 随着半导体器件结构的微细化,对制造工程的洁净化,即洁净室的要求变得非常严格。一般认为,在器件中,只有图形尺寸十分之一大小的尘埃,也会对该器件的可靠性和成品率产生影响。因此,在最先进的器件中,就要把0.1μm大小的尘埃作为一个问题来考虑。超净室就是为了除去这种0.1μm粒子而用特殊过滤器拼成的洁净空间。洁净度一般用一立方英尺空间内存在的粒子数目来表示,目前已达到10级和1级,并用于VLSI的大量生产中。被称为洁净通道(Clean tunnel)的装置,把超净室结合到VLSI制造工序流水线中构成连续的作业区,这样就能够避免人和设备所发生的
Super Clean Room With the miniaturization of the semiconductor device structure, the requirements for the cleanliness of the manufacturing process, that is, the clean room, have become very strict. It is generally accepted that only one-tenth the size of the dust in a device’s dimensions affects the reliability and yield of the device. Therefore, in the most advanced device, it is necessary to consider the size of 0.1μm dust as a problem. The clean room is a clean room made of special filters to remove the 0.1 μm particles. Cleanliness is generally expressed in terms of the number of particles present in one cubic foot of space and has now reached levels 10 and 1 and is used in mass production of VLSI. Known as the Clean Tunnel unit, the clean room is integrated into the VLSI manufacturing process to create a continuous work area in the assembly line, thus eliminating the risk of people and equipment