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一、前言非球面透镜离子束抛光法是把氩(Ar)、氪(ke)、氙(Xe)等不活性气体原子在真空中(真空度10~(-2))用高频或放电等方法使之离子化,同时给以电加速(加速电压20～50KV),使其能对置于高真空中(真空度10~(-5))的抛光过的珠面透镜进行轰击,非热式地从表面对玻璃实质部份按原子的大小一一置换(亦称溅射),以10～20μm程度的球面进行修正加工来制作非珠面透镜的方法。
I. Introduction Aspheric lens ion beam polishing method is to argon (Ar), krypton (ke), xenon (Xe) and other inert gas atoms in a vacuum (vacuum degree of 10 -2) with high frequency or discharge Method to make it ionized, at the same time to give the electric acceleration (acceleration voltage 20 ~ 50KV), it can be placed in a high vacuum (degree of vacuum 10 ~ (-5)) polished bead lens bombardment, non-hot A method in which a non-spherical lens is produced by performing a one-to-one replacement (also referred to as sputtering) of the substantial part of the glass from the surface on the basis of the size of the atoms and performing a correction process on the spherical surface with a degree of 10 to 20 μm.