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研究了X射线衍射的结构深度分布分析新方法该方法以不同的入射角入射，测量各物相的衍射谱，进而解出各确定深度处薄层的X射线衍射谱，从而可无损和定量地得到各深度处的衍射线的角度位置、强度和线型等全部结构信息此方法可得到各确定深度处的结构信息，而不是由表面到某深度处的平均结构信息；并且适用于具有择优取向的样品和吸收系数随深度而变化的样品．用此方法研究了Pd／Ag双层膜的退火过程，发现在互扩散的过程中，平行于初始界面的薄层中的结构不是微观均匀的，而是由两种具有不同点阵参数的固溶体构成的．结果证实该方法的可行性和有效性，也有利于研究Pd／Ag系统以及相关系统的扩散机理
A new method for analyzing the structure depth distribution of X-ray diffraction is studied. The method is based on the incident angle and the diffraction spectrum of each phase is measured. Then the X-ray diffraction spectra of the thin layers at different depths are solved, Get all the structural information such as the angular position, intensity and linearity of the diffraction line at each depth. This method can get the structural information at each determined depth, not the average structural information from the surface to a certain depth. Of the sample and the absorption coefficient varies with the depth of the sample. The annealing process of the Pd / Ag bilayer was studied by this method. It was found that in the process of interdiffusion, the structure in the thin layer parallel to the initial interface is not microscopic but uniform, and the two solid solutions with different lattice parameters Constitute. The results show that the method is feasible and effective, which is also conducive to the study of the diffusion mechanism of Pd / Ag systems and related systems