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研究了双缸结构的双级滑阀真空的振动平衡,提出了定量平衡双级滑阀真空泵振动的方法;运用最小二乘法获得多级平衡配重的关键参数,精确平衡双级滑阀真空泵的不平衡惯性力。以2H-150滑阀真空泵为例进行振动平衡,平衡后的剩余惯性力减至1500N以内,振动力降幅达到80%左右;应用多级平衡配重方法所设计的真空泵在松地脚螺钉时的最大振幅仅为0.13mm。因此,针对双级滑阀泵振动的平衡计算方法是行之有效的,可使泵的振动在很小的范围内。
The vibration equilibrium of double-stage slide vacuum pump with double-cylinder structure was studied. The method of quantitatively balancing the vibration of vacuum pump with double-stage slide valve was proposed. The least square method was used to obtain the key parameters of multi-stage balance weight. Unbalanced inertial force. Taking 2H-150 slide valve vacuum pump as an example, the balance of inertial force is reduced to less than 1500N and the vibration force is reduced by about 80%. The vacuum pump designed by multi-level counterweight method is used when the loose- The maximum amplitude is only 0.13mm. Therefore, the calculation of the balance of double-stage spool pump vibration is effective, can make the pump vibration in a very small range.