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本文研究了用辉光放电热分解硅烷方法淀积的微晶-Si:H薄膜的Steabler Wronski(SW)效应。用改变高频功率的方法,获得从非晶到具有不同晶粒大小的微晶薄膜。晶粒尺度用小角散射方法,由Guinier公式算出。样品采用蒸铝条状共面电极结构。测量电导所加电场约为270V/cm,保证良好的欧姆接触。样品在干氮保护下,经180℃,40分钟退
In this paper, the Steabler Wronski (SW) effect of microcrystalline -Si: H films deposited by glow discharge thermal decomposition of silane has been studied. By varying the high-frequency power, a microcrystalline thin film from amorphous to different grain size is obtained. The grain size is calculated by the Guinier equation using the small-angle scattering method. Samples using steamed aluminum strip coplanar electrode structure. The electric field applied to measure the conductance is about 270 V / cm, ensuring good ohmic contact. Samples were retreated with dry nitrogen at 180 ° C for 40 minutes