Diagnosis of Hydrogen Plasma in a Miniature Penning Ion Source by Double Probes

• 作 者: 金大志 杨中海 肖坤祥 戴晶怡
• 机 构: School of Physical Electronics,University of Electronic Science and Technology of China,Institute of
• 出 处: Plasma Science and Technology
• 发表日期: 2009年01期
• 关键词: Hydrogen miniature logging probes saturation Probe sealed naked neutron ultravio

Parameters of hydrogen plasma in a miniature Penning discharge ion source,in-eluding the electron temperature and the electron density,were measured by using double probes.The results indicate that the electron density increases and the electron temperature decreaseswith the increase in gas pressure and the discharge current.The electron temperature is about5～9 eV and the electron density is 6.0×10~(13)～1.2× 10~(14)m~(-3)while the discharge current is in arange of 50～120 μA.

Parameters of hydrogen plasma in a miniature Penning discharge ion source, in-eluding the electron temperature and the electron density, were measured by using double probes. The results indicate that the electron density increases and the electron temperature decreases with the increase in gas pressure and the the discharge current is in arange of about 5~9 eV and the electron density is 6.0 × 10 ~ (13) ~ 1.2 × 10 ~ (14) m ~ (-3) while the discharge current is in arange of 50~120 μA.