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离子注入机经过二十多年来的发展,其主要技术指标,如加速能量、束流、注入剂量控制的均匀性和重复性以及生产率等都已达到较高的水平,在半导体工业中获得广泛的应用。国外从事离子注入机生产的主要工厂从1971年的八家增加到14家左右。据80年的统计材料,全世界离子注入机的销售总额为8890万美金,如平均按每台30万美元折算(80年的价格),相当于年产量为300台左右。据最近国外文献报导,近几年离子注入
After more than two decades of development, ion implanters have reached a high level in terms of main technical indicators such as acceleration energy, beam current, uniformity and repeatability of injected dose control, and high productivity, and are widely used in the semiconductor industry Applications. The main factories engaged in the production of ion implanters abroad increased from eight in 1971 to about 14. According to the 80-year statistics, the worldwide sales of ion implanters totaled 88.9 million U.S. dollars, with an average of 300,000 U.S. dollars (80 years), equivalent to an annual output of about 300 units. According to recent foreign literature, ion implantation in recent years